Effect of Beam-Plasma Interaction on Characteristics of Drilling : Study on Material Processing by High Peak, Short Pulse CO_2 laser

概要

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The fundamentals of laser beam drilling were studied using a high peak, short pulse CO_2 laser. Specifically, those areas examined were the effects of the beam-plasma interaction and heat accumulation near the irradiation point during multi-pulse irradiation on the characteristics of drilling Si_3N_4 ceramics and acrylic resin (PMMA). In the case of beam-plasma interaction, the drilling efficiency and hole shape were compared in a vacuum and in air. For heat accumulation, holes formed with a few pulse frequencies, which had enough time to cool, were compared with those formed at higher pulse frequencies. The results revealed that in the case of drilling Si_3N_4 in air, beam scattering by the plasma plurne decreased drilling efficiency and increased the hole diameter. Also, decreasing the pulse duration or drilling in a vacuum could successfully improve the drilling effifciency. Furthermnore, in PMMA, the hole diameter of low aspect ratio holes was greatly increased by heat accumulation, and as the aspect ratio increased there was a significant increase in hole diameter caused by the beam scattering by the plasma plume.
社団法人溶接学会の論文
1993-10-01