Auger Analysis on Atomic Interaction Across Metal-Ceramic Interface

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概要

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• The valence Auger spectra have been studied in order to understand chemical bonding (atomic interaction) across the interface between metals and ceramics. Silica was adopted as the ceramic and 3d-metals were used as the metal. M (Metal)-Si- wafre interface was also analyzed to comprehend the characteristic features of Si-O, M-O and M-Si bond in spectra. Metal was deposited on Silica and Si-wafer substrates at a residual pressure about 5x10^<-5> Pa and specimens were annealed. The demage induced by Ar^+ -and electron-bombardment was observed. The dose of primary electron beam was kept constant across the interface. The Si-O bond was detectable from the energy of Si-LVV peaks. The M-O bond was also detectable at the interface by using the Auger intensity ratio of M-LM_<22>M_<45>/M-LM_<23>M_<23>. The change in the intensity ratio of (SiO_2-L_<23>V_1D+Si-LM_<23>M_<23>)/SiO_2-LV_1V_1 with metal contents was helpful to confirm the interfacial M-Si bonds under the condition that the electronic dose was kept constant at each analyze-point through the interface. The transition elements which exhibite a small number of 3d electrons, such as IIIa-VIa metals, tend to lose the metallic property in electronic structure.

• 社団法人溶接学会の論文
• 1993-04-01

著者

• Nishiguchi K

  Welding And Production Engineering Osaka University

• TAKAHASHI Kunio

  Mechanical Engineering for Propuction, Tokyo Institute of Technology

• TAHAHASHI Yasuo

  Welding Research Institute, Osaka university

• NISHIGUCHI Kimiyuki

  Welding and Production Engineering, Osaka University

• Tahahashi Yasuo

  Welding Research Institute Osaka University

• Takahashi Kunio

  Mechanical Engineering For Propuction Tokyo Institute Of Technology

関連論文

• Auger Analysis on Atomic Interaction Across Metal-Ceramic Interface

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