Invited paper The 3D Measurement and Analysis of High Precision Surfaces (国際セッションIS--EMD 2003) -- (Session 2 Measurements and evaluation)

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概要

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• The paper reviews methods for the measurement and analysis of high precision surfaces. A number of measurement techniques are discussed with the emphasis on the application of con-focal methods The various techniques are compared in terms of measurement times, data density, and the ability to detect near vertical surfaces, and steps The two sensing methods discussed are the auto-focus laser method and the white light methods Particular applications considered are in the measurement of eroded electrical contact surfaces, spherical and near spherical surfaces, and MEMS The particular emphasis here is on the metrology of such surfaces and devices and methods for the assessment of complex micro-machined surfaces The paper points to a number of directions for improved metrology and discusses these in the context of the application given

• 社団法人電子情報通信学会の論文
• 2003-11-13

著者

• Maul Christian

  Taicaan Technologies Ltd

• MCBRIDE John

  School of Engineering Sciences, University of Southampton

• Mcbride John

  School Of Engineering Of Science University Of Southampton

関連論文

• The 3D Measurement and Analysis of High Precision Surfaces
• Invited paper The 3D Measurement and Analysis of High Precision Surfaces (国際セッションIS--EMD 2003) -- (Session 2 Measurements and evaluation)
• The 3D Measurement and Analysis of High Precision Surfaces Using Con-Focal Optical Methods(Measurement and Evaluation)(IS-EMD2003 : Recent Technical Trend of Electro-Mechanical Devices)
• An investigation of the robustness of the nonlinear least-squares sphere fitting method to small segment angle surfaces
• A Review of Volumetric Erosion Studies in Low Voltage Electrical Contacts(Recent Development of Electro-Mechanical Devices (IS-EMD 2002))

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