Characteristics of Polytetrafluoroethylene Thin Films Prepared by Ionization-Assisted Deposition(Special Issue on Organic Materials for Optics and Electronics)

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概要

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• Thin films of PTFE(mean molecular weight of source material 8500)were deposited by ionization-assisted deposition(IAD)method at different ion acceleration voltages Va on substrates kept at room temperature. The molecular chains in the film were found to be oriented in parallel with the substrate, and the film has preferential crystal orientation to(100)plane. Although the ion acceleration did not give significant influence on the film orientation and chemical structure, IAD was effective to improve the surface smoothness. The Cu decoration test revealed that the pinhole density in the film is reduced and the insulating capability is improved by depositing the film at Va=500V. The result of dielectric loss measurement for Al/PTFE/Al capacitors was in consistency. However, excessive ion acceleration deteriorated the insulating property, probably due to the dielectric breakdown that occurred in the course of deposition.

• 社団法人電子情報通信学会の論文
• 1998-07-25

著者

• Usui Hiroaki

  The Department Of Material Systems Engineering Tokyo University Of Agriculture And Technology

• TANAKA Kuniaki

  the Department of Electronics and Mechanical Engineering, Chiba University

• Koshikawa Hiroshi

  Presently With Department Of Material Development Takasaki Radiation Chemistry Research Establishmen

• Tanaka Kuniaki

  The Department Of Material Systems Engineering Tokyo University Of Agriculture And Technology

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• Evaluation of Electrical Properties of Merocyanine Films Doped with Acceptor or Donor Molecules by Field Effect Measurements(Special Issue on Organic Materials for Optics and Electronics)
• Deposition of Polymeric Thin Films by Ionization-Assisted Method (Special Issue on Organic Molecular Electronics for the 21st Century)
• Characteristics of Polytetrafluoroethylene Thin Films Prepared by Ionization-Assisted Deposition(Special Issue on Organic Materials for Optics and Electronics)

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