Laser Deposition of Y_1Ba_2Cu_3O_<7-δ>-SrTiO_3-Y_1Ba_2Cu_3O_<7-δ>Multilayers Utilizing the 4th Harmonics of Nd:YAG Pulse Laser (Special Issue on Toward Digital and Analog Applications of Superconductors)

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The 4th harmonics of a Nd:YAG laser beam (266nm) is applied to fabricate highly oriented Y_1Ba_2Cu_3O_<7-δ>-SrTiO_3-Y_1Ba_2Cu_3O_<7-δ> multilayer structures. It has been shown that the emission temperature of a film surface will change during deposition, depending on deposition conditions, even though the heater temperature is constant. The change of substrate temperature is strongly correlated to film characteristics such as critical temperature, c-axis length, and resistivity. The in situ monitoring of the substrate temperature is useful for obtaining high-quality Y_1Ba_2Cu_3O_<7-δ> films reproducibly. It is also shown that a SrTiO_3 layer prevents oxygen restoration in a Y_1Ba_2Cu_3O_<7-δ> underlayer. The relationship between oxygen deficiency and the annealing conditions is studied.
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1996-09-25