Interfacial Study of Nb Josephson Junctions with Overlayer Structure (Special Section on Superconducting Devices)
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We compare interfaces of Nb/AlO_x-Al/Nb and Nb/ZrO_x-Zr/Nb junctions using secondary ion mass spectroscopy and cross-sectional transmission electron microscopy. We have clarified that an interface of the Nb/AlO_x-Al/ Nb junction is drastically different from that of the Nb/ZrO_x-Zr/ Nb junction. An adsorbed water vapor layer plays an important role in suppressing grain boundary diffusion between Nb and Al at the interface of the Nb/AlO_x-Al/Nb junction. In depositing Nb and Al at low power and cooling the substrate, it is important to control the formation of the adsorbed water vapor layer for fabricating Nb/AlO_x-Al/Nb junctions exhibiting excellent current-voltage characteristics.
- 社団法人電子情報通信学会の論文
- 1994-08-25
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関連論文
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