Influence of Cross-Sectional Deformation on Coplanar Waveguide Characteristics for the Use of Optical Modulator (Special Issue on Electromagnetic Theory)

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In this paper, the influences of the cross-sectional deformation on the coplanar waveguide (CPW) characteristics for the use of Ti:LiNbO_3 optical modulator are presented based on quasi-static analysis. In particular, the influences of the changes in the thickness of Ti:LiNbO_3 substrate and the cross-sectional shape of electrodes are studied in detail by using the finite element method proposed previously. As a result, it is found that the propagation characteristics of the dominant mode change significantly with the thickness of LiNbO_3 substrate when it is less than 100 μm. It is also shown that an inverted trapezoidal deformation of the electrode cross section is promising because a wider electrode gap and thinner electrodes are available in the design of optical modulators.
社団法人電子情報通信学会の論文
1994-11-25