Fabrication of YBa_2Cu_3O_<7x>PrBa_2Cu_3O_<7y> Hetero-Structure by Using a Hollow Cathode Discharge Sputtering System (Special Issue on High-Temperature Superconducting Electronics)

概要

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A sputtering system using dc hollow cathode discharge was developed for the propose of high Tc superconducting devices. Using this system, as-grown superconducting thin films of YBCO have been formed on MgO and SrTiO_3 substrates. Influence of the sputtering conditions such as the substrate temperature and discharge gas pressure on the T_c and lattice parameter was investigated. It was found that superconducting films on MgO with T_<c・zero> higher than 87 K were routinely obtained at the pressure of 820 mTorr (5%O_2) and substrate temperature of 700℃ during deposition. The a / b-axis and c-axis oriented YBCO-PBCO hetero-structures were also successfully formed on MgO and SrTiO_3 substrates.
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1993-08-25