Superconducting Properties of EuBa_2Cu_3O_7 Thin Films Deposited on R-Plane Sapphires with CeO_2＼Sm_2O_3 Buffer Layers Using Magnetron Sputtering(<Special Section>Recent Progress in Oxide Thin Films by Sputtering)

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概要

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• In order to improve the critical current density (J_c) of caxis-oriented EuBa_2Cu_3O_7 (c-EBCO) thin films deposited on R-plane sapphires (R-Al_2O_3) with a CeO_2 buffer layer, insertion of an Sm_2O_3s buffer layer and optimization of its deposition condition were attempted. The effects of substrate temperature and film thickness of an Sm_2O_3 buffer layer on the orientation, crystallinity, surface morphology and superconducting properties of EBCO thin films were examined. As a result, EBCO thin films with J_c = 5.7MA/cm^2 at 77.3K were obtained on a sapphire with a CeO_2(80 Å)＼Sm_2O_3(200 Å) buffer layer. Epitaxial relations of sputterdeposited films were clarified.

• 社団法人電子情報通信学会の論文
• 2004-02-01

著者

• Kikuchi Shinji

  Faculty Of Engineering Iwate University

• Michikami Osamu

  Faculty Of Engineering Iwate University

• OTA Yasuyuki

  Faculty of Engineering, Iwate University

• Ota Yasuyuki

  Faculty Of Engineering Iwate University

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• Recovery Treatment of EuBa_2Cu_3O_ Thin Films with Activated Oxygen Plasma
• Non-c-axis-Oriented EuBa_2Cu_3O_ Thin Films Grown on Al_2O_3(1102) Substrates with CeO_2 Buffer Layers
• EuBa_2Cu_3O_ Thin Films Grown on Sapphires with Epitaxial CeO_2 Buffer Layers
• Characteristcs of Ga-Doped ZnO Films Prepared by RF Magnetron Sputtering in Ar + H_2 Ambience
• Superconducting Properties of EuBa_2Cu_3O_7 Thin Films Deposited on R-Plane Sapphires with CeO_2＼Sm_2O_3 Buffer Layers Using Magnetron Sputtering(Recent Progress in Oxide Thin Films by Sputtering)
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• Effect of Sputter Gas Pressure and RF Power on Surface Morphology of CeO2 Buffer Layers and Superconducting Properties of EuBa2Cu3O7-δ Thin Films by Magnetron Sputtering

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