ED2000-44 / SDM2000-44 A Study on the Characteristics of High Performance Self-Aligned Asymmetric Structure(SAAS)
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概要
- 論文の詳細を見る
A newly developed Self-Aligned Asymmetric Structure(SAAS) which has the asymmetric halo at the highly doped source extension has been designed and investigated for high performance and reliability. Proposed fabrication process for the asymmetric structure enables the source/drain and channel to be designed independently without additional masking steps. The hydrodynamic device simulation coupled with the process simulation shows that the highly doped asymmetric halo enhances velocity overshoot at source side and effectively suppresses short channel effects. The degradation of driving capability due to increased resistance in the highly doped asymmetric halo is effectively reduced by employing highly doped asymmetric source extension without sacrificing hot carrier reliability.
- 社団法人電子情報通信学会の論文
- 2000-06-21
著者
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Choi Woo-Young
Massachusetts Institute of Technology
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Choi Woo-young
Department Of Electrical And Computer Engineering Yonsei University
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Kim Kyung-whan
Department Of Electrical And Computer Engineering Yonsei University
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Choi Chang-soon
Department Of Electrical And Computer Engineering Yonsei University
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