高周波強力超音波発生用圧電セラミック振動子のベベル加工による振動特性改善

概要

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The effects of bevelling on the thickness vibrations of Pb(Zr・Ti)O_3 piezoelectric ceramic disk transducers for generating high frequency ultrasonic power are studied through the measurements of electrical characteristics and vibration displacements. A laser heterodyne system is employed for the contact-free measurements of the displacement distributions over the disks. It is shown for the wide range of the diameter to thickness ratios that bevelling circular edges is effective to reducing the coupled radial vibrations and to enhancing the uniform thickness vibrations. The motional admittance, displacement distribution factor and effective radiating area are increased by bevelling. These results are accounted for by the energy trapping of thickness vibrations and by the eventual decrease in the equivalent mass of transducers.
社団法人日本音響学会の論文
1982-08-01