Pulsing a Low Pressure Radiofrequency Discharge
スポンサーリンク
概要
- 論文の詳細を見る
A 1 D Particle-in-Cell(PIC-MCC)simulation has been used to study the effect of temporal modulation(pulsing)of an rf(13.56MHz)source voltage on the evolution of an argon plasma. Plasma breakdown occurs during the first on-time of the pulse and analytic expressions for the density evolution during and after breakdown are presented for the single pulse case. The effect of multiple pulsing on the plasma development is then examined and compared with the steady-state evolution. Experimental measurements of pulsing in a parallel plate rf system are also presented, which have a high qualitative agreement with the simulation results.
- 一般社団法人日本機械学会の論文
- 1998-05-15
著者
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Smith H.b.
Space Plasma And Plasma Processing Plasma Research Laboratory Rs Phys Se The Australian National Uni
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CHARLES C.
Space Plasma and Plasma Processing, Plasma Research Laboratory, RSPhysSE, The Australian National Un
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BOSWELL R.W.
Space Plasma and Plasma Processing, Plasma Research Laboratory, RSPhysSE, The Australian National Un
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KUWAHARA H.
Nissin Electric Co., Ltd., Research and Development Division
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Charles C.
*nissin Electric Co. Ltd. R & D Division 47 Umezu-takase-cho Ukyo-ku Kyoto 615 Japan