X線反射率によるスピンバルブ膜の構造解析の検討

概要

論文の詳細を見る
Changes in the thickness of each layer of a spin-valve film have a strong influence on the film's GMR properties.When X-ray refkectivity is used to determine the layered struccture of spin-valve films, however, closer refractive indices among Cu, CoFe, and NiFe layers make structural analysis difficult with a Cu-K_a X-ray.The refractive index of rach layer depends on the X-ray wavelength.We succeeded in obtaining a suitable X-ray wavelength for the spin-valve structure of Si/Ta/NiFe/Cu/CoFe/PdPtMn/Ta.If a Co-K_B X-ray id used, the thickness of each layer can be detemined more accurately than when a Cu-K_a X-ray is used. We confirmed by Co-K_B X-ray reflectivity measurement that the accuracy of the analyzed thickness was within 5% of the thicknes obtained by X-ray fluorescence mesurement.
社団法人日本磁気学会の論文
1998-04-15