Signal-to-Medium-Noise Ratio of CoPt/Cr Longitudinal Media Improved by Deposition of Nucleation Site Layer and Removal of Adherent Gas
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概要
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A medium formation technique for fabricating high purity Co_90Pt_10 magnetic thin film with uniform grain size was developed, whereby the signal-to-medium-noise ratio (S/Nm) can be improved.In this technique, a Co_90Pt_10(CP) island layer is deposited as a nucleation site layer (NSL) on SiO_2/Si disk substrate with adherent gas.After the deposition, a heat treatment is sequentially carried out in order to remove the adherent gas.High purity films can be produced by the removal of adherent gas.A Cr film and a Co_90Pt_10 magnetic film are successively deposited after the heat treatment (HT).In the deposition of Cr film, the fabricated Co_90Pt_10 island forces nucleation of Cr grain to start from the Co_90Pt_10 island and thus eliminates simultaneous nucleation from many points on the region without the Co_90Pt_10 island.The resulting Cr film as a underlayer is composed of a monolayer of closely packed Cr Grains with uniform grain size.In this medium formation, nucleation of Co_90Pt_10 grain to magnetic layer to start from the Cr grain to underlayer is created.Therefore, Co_90Pt_10 magnetic thin film with uniform grain size is produced.The fabrication of high purity Co_90Pt_10 magnetic film with uniform grain size has been achieved by the deposition of NSL and removal of adherent gas.As a result, it is indicated that the use of this technique results in increase of S/Nm at 304.4 kFCI of 25%.
- 社団法人日本磁気学会の論文
- 2001-03-15
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- Signal-to-Medium-Noise Ratio of CoPt/Cr Longitudinal Media Improved by Deposition of Nucleation Site Layer and Removal of Adherent Gas