Cu-FeCo酸化物グラニュラー薄膜の磁気特性

概要

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Using dc-magnetron sputtering, Fe, Co, and Cu were sputtered on a glass substrate. The samples were annealed at 500℃ in a vacuum, air, or nitrogen atmosphere. It was found that the samples annealed in nitrogen showed a coercive force of over 200 kA/m. Hysteresis loop measurements and the results of ESCA and X-ray diffraction analysis seem to suggest that Co-Fe_2O_4 ferrite was the major magnetic component formed by the residual oxygen during annealing. On this assumption, the O_2 pressure during annealing was altered, and it was found that the coercive force increases as the oxygen pressure decreases, and that it reaches 115 kA/m when the oxygen pressure is about 8 mTorr.
社団法人日本磁気学会の論文
2000-04-15