多層Nd-Fe-B/Ta垂直磁化薄膜の微細組織と磁気特性

概要

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Multilayered films consisting of alternately deposited 200-nm-thick Nd-Fe-B or Nd-(Fe, Co)-B and 10-nnrthick Ta layers were prepared by magnetron sputtering on heated glass substrates. The periodically allocated Ta layers reduced and regularized the size of the Nd2Fei4B grains evolved in the films. It was also proved that the Ta layers enhanced the alignment of the Nd_2Fe_<14>B grains with their c-axes pointing in a direction normal to the film plane. The addition of Co to the Nd-Fe-B films decreased the optimum temperature to which the substrate should be heated during the deposition, and suppressed the local variation in the grain size of NdaFewB, even in films with a total thickness of about 10 |im. In spite of the strong demagnetization effect in the direction normal to the film plane, permanent magnetic properties of J_r = 1.30 T, U_<cJ> = 927 kA, and (BH)_<max> = 319 kJ/m^3 were obtained for a [Nd-Fe-B (200 nm)/Ta (10 nm)]_5 film, and J_R = 1.24 T, H_<cj> = 1210 kA, and (BH)_<max> = 279 kJ/m^3 for a [Nd-(Fe, Co)-B (200 nm)/Ta (10 nm)]_<50> film.
社団法人日本磁気学会の論文
2004-10-01