143 液体の表面張力を利用したマイクロ部品のセルフアライメント : マイクロ部品や液滴の挙動とアライメント精度

概要

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The purpose of this research is to establish the self-alignment technique for the microparts assembly using liquid surface tension, which can use widely. For this purpose, we have proposed the following self-alignment method using the microparts of which surface is divided into two kinds of areas, that is, the wettability of one area is higher than that of the other : (1) first, a drop of liquid is put on high wettablity surface area of the first part, (2) next, the second part is put on the first one, (3) and then the second part is moved by the surface tension of the liquid so that the wettability area pattern of the first part overlaps with that of the second one, (4) finally, the alignment is accomplished. In this paper, first, the behavior of microparts and liquid in the alignment are examined experimentally and theoretecally. And then the relationship between the behavior and the alignmnent accuracy is discussed.
2000-03-24