550 MEMS構造要素における構造、流体、静電連成現象の有限要素解析(OS16 流体-(マイクロ)構造物における干渉とその制御)(OS16 流体-(マイクロ)構造物における干渉とその制御)

概要

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This paper describes a method to simulate the interaction among structural, fluid and electrostatic phenomena in micro-electro mechanical systems (MEMS). Due to a micro scale effect, MEMS components are strongly affected by air. An electrostatic actuator, which is popular in MEMS, also interacts with an electrostatic field. In the present work, we propose an iterative staggered algorithm for coupled structural-fluid and coupled structural-electrostatic phenomena. The method can reuse existing codes and modules easily. The proposed method is applied to analyses of a bridge structure of MEMS, which is actuated by electrostatic force. The results show a good agreement with experimental results.
一般社団法人日本機械学会の論文
2001-11-27