超精密加工技術の現状と展望

概要

論文の詳細を見る
In Japan, ultra-precision macining technology has grown with an expanded demand of high precision parts that are used for private industries such as OA instruments, optical fiber communication and semi-conductor manufacturing devices, And, the development process is different from in U. S. A Passing 20 years, the technology is now indispensable as supporter of these industries. The technology with the key word of "ultra-precision" is able to produce high value added and display originality over in future. This paper introduces ultra-precision machines and the components technology used.
社団法人日本機械学会の論文
2001-11-20