〔計測器(d)〕静電容量式半導体加速度センサと試験装置(最近のダンピング計測技術の動向について(計測器メーカーによる講演とデモンストレーション))(最近のダンピング計測技術の動向について)

概要

論文の詳細を見る
The sensor is indispensable to vibration measurement. The highly efficient one is expensive until now, and the scope was restricted. Mass production of the accelerometer small with high performance was attained by progress of MEMS (Micro Electro Mechanical Systems) technology in recent years, and the sensor became cheap. The scope of a sensor is applied to various fields, such as derailment detection of the attitude control of a car, or a train, and landslide detection. The performance in low frequency may be required. This paper describes the silicon capacitive accelerometer currently manufactured by MEMS technology, and the examination equipment of low frequency.
社団法人日本機械学会の論文
2002-01-11