211 弾性表面波の定在波振動を用いた液体の搬送と霧化

概要

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This paper describes a new configuration of SAW (surface acoustic wave) fluidic device. The SAW device using LiNbO_3 was fabricated to transport and atomize liquid. This device interacts with liquid on IDT electrodes, whereas conventional SWA device interacts on wave propagation lane. We tested six types of liquid; purified water, tap water, ethanol, and fluorinert (FC40,FC70,FC77). Ability of liquid transportation was evaluated by observing spout flow. Among those six liquids, fluorinerts, ethanol, and purified water were successfully transported, whereas tap water was not. By coating electrodes with urethane resin, every liquid including tap water was successfully transported. Also, atomizing ability of the fabricated device was tested. Every liquid was successfully atomized, both on coated and non-coated devices.
一般社団法人日本機械学会の論文
2003-04-18