単結晶引上げ装置のるつぼ内融液流の研究

概要

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Melted flow behavior under a Czochralski crystal-growth has been simulated by our original code based upon FEM. Important factors were considered as crucible bottom shape, crystal diameter, crystal rotation, crucible rotation and kinematic viscosity of fluid, which would influence the flow behavior. By parametric study performed using these factors, it could be concluded that radial flow around a rotating crystal should be restrained to reduce oxygen deposition into the crystal, and moreover that periferal speed of the crystal and that of the crucible should be kept constant to avoid the crystal striation. It would offer us high grade crystals.
一般社団法人日本機械学会の論文
1986-05-25