インコヒーレント照明におけるグレーティングイメージを用いた精密変位測定

概要

論文の詳細を見る
The interference phenomenon known as grating imaging is studied from the viewpoint of displacement measurement. For the transmission and reflection arrangements of the gratings, the characteristics of the fringes, which are obtained at the infinite image plane under incoherent illumination, are examined quantitatively by the calculations based on the incoherent superposition of multi-diffraction patterns of the grating. Advantageously using the fringe obtained in the transmission optical arrangement, the grating separation and the lateral displacement have been measured simultaneously by a CCD camera. Furthermore, using 25μm gratings and an alignment system with piezoelectric actuators, the preliminary experiment for precise alignment technique has been performed.
一般社団法人日本機械学会の論文
1988-10-25