ターボ分子ポンプの排気特性に関する研究 : 第2報, 多段翼列の排気特性解析

概要

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The velocity distribution of molecules between stages is not Maxwellian in the multistage pumps. In this paper, the analysis of the performance in the multiple stages is performed with the consideration of this velocity distribution. In this method, the incident molecular velocity to each stage is corrected by the iteration method, and the transmission probabilities of individual stages are calculated by the Monte Carlo method. The present method has almost the same accuracy as the exact method, in which the overall transmission probabilities are calculated by the Monte Carlo method for the entire set of multiple stages, and the computing time by the former method is much shorter than that by the latter method. Furthermore, the influences of the several parameters on the multistage effect, which is expressed as the ratio of the result calculated by the present method to that calculated by the direct multiplication method, have been investigated.
1991-02-25