燃結ダイヤモンドターゲットを用いたDLC膜の合成及びその機械的・光学的特性の評価 : 機械要素,潤滑,工作,生産管理など

概要

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Diamond-like carbon (DLC) film has outstanding properties, such as high hardness, chemical resistance, and low friction coefficient under various conditions ; however, DLC films deposited by conventional methods still have a problem in low optical transmittance due to sp^2 carbons remaining in the film. This paper describes sputtering deposition of DLC films using a sintered diamond target, which consist of sp^3 carbons. Mechanical and optical properties of the DLC films were discussed in comparison with the DLC films prepared using a graphite target, and it was found that not only the hardness but also the transmittance of the DLC film grown from a sintered diamond target were higher than that for a film grown from a graphite target. These results indicate that the target material has the strong effect on the properties of DLC films, and high-quality DLC films can be prepared using a sintered diamond target.
一般社団法人日本機械学会の論文
2001-04-25