上下アクチュエータを用いた精密機器の水平相対変位制御

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rights: 社団法人日本機械学会rights: 本文データは学協会の許諾に基づきCiNiiから複製したものであるrelation: IsVersionOf: http://ci.nii.ac.jp/naid/110002383983/This paper describes all active vibration control system which controls horizontal relative displacement using vertical actuators. In precision machines, it is essential to reduce the horizontal relative displacement between two important elements e.g. an object glass and the specimen table of a scanning electron microscope. The vibration control system is composed of passive devices with springs and dampers, and vertical actuators arranged parallel to the passive devices. In an experiment, a machine model on a base and the active vibration control system were modeled after two masses and four degrees-of-freedom, and vertical actuators were controlled by state feedback and a Kalman filter with respect to floor vibrations. An experiment for controlling the horizontal relative displacement of a machine model through vertical actuators was done, so that effectiveness of the active vibration control system could be verified.
1998-09-25