ファイバ式レーザ干渉計による磁気ヘッドスライダの非定常挙動計測システムの開発

概要

論文の詳細を見る
A multi channel measurement system using a laser interferometer with 8nm accuracy was developed to measure the transient behavior of magnetic head sliders for magnetic disk drives. It features a laser-beam group converger, which focuses multiple laser beams on small areas of both the disk and the slider. This system also eliminates the influence of disk runout due to its high measurement accuracy. The main advantage of this system compared with white light interferometry and capacitance measurement methods is that it is applicable to actual disks and sliders. The system is useful for evaluating the slider's behavior during the contact sliding, take-off, steady flying, and landing processes.
一般社団法人日本機械学会の論文
1996-09-25