ペニング放電マイクロスパッタリングにより現出した金属組織の顕微鏡観察のためのレプリカ作成技術

概要

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A combination of penning discharge micro sputtering techniques and non destructive replication method have been applied for etching an austenitic stainless steel SUS 316 H after creep and rupture testing. The micro-sputtering produced clear and reproducible microstructures so that grain boundaries, creep voids, carbides and σ phase precipitates were readily characterized. The replica taken from the specimen surface after micro-sputtering were observed by optical and scanning electron microscopes. Several factors during replica sampling such as an adherence between replica film and specimen surface, expansion and contraction of the film and so on, which can affect a quality of resulting microstructures, were examined and the sampling procedures were improved. Optimizing the conditions of replica sampling, clear microstructures as good as those by conventional chemical etching were obtained and the A parameter and area fraction of creep voids were quantitatively evaluated for analysis of microstructural degradation during creep.
社団法人日本機械学会の論文
1998-03-25