B14-061 MULTISCALE ANALYSIS OF RAREFIED GAS FLOWS

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概要

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• The new method for solving the nonequilibrium rarefied gas flows is introduced. This method based on the multiscale analysis connects the thermofluid phenomena that occur in the different time and spatial scales by constructing the reasonable physical model among them. In this method, the new site-to-site intermolecular potential model is determined from the accurate ab initio molecular orbital (MO) calculations at first. Next, the collision characteristics such as the total collision cross section and the scattering angle are modeled by the statistical analysis of classical trajectory (CT) calculations using the new potential model. Finally, these collision models are applied into the direct simulation Monte Carlo (DSMC) calculation. As an example of the analysis, the molecular collision of silane gas, which is widely used in the semiconductor manufacturing process, is considered.

• 一般社団法人日本機械学会の論文
• 2003-11-30

著者

• Matsumoto Yoichiro

  Dept Of Mechanical Engineering The University Of Tokyo

• SAKIYAMA YUKINORI

  Dept of Mechanical Engineering, The University of Tokyo

• Sakiyama Yukinori

  Dept Of Mechanical Engineering The University Of Tokyo

関連論文

• B14-061 MULTISCALE ANALYSIS OF RAREFIED GAS FLOWS

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