A14-093 DEVELOPMENT OF MEMS COMPONENT ASSEMBLY MACHINE : APPLICATION OF ROBOTICS TECHNOLOGY TO MICROMECHATRONICS

概要

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The assembly task of the MEMS components that are produced by micro machining or semiconductor technology is indispensable for the advancement of MEMS industry. Although it requires high accuracy with a fast cycle time for the mass production, this is a trade-off problem that must be carefully chosen depending on the application. The authors approached to this issue from the robotics viewpoint. This paper describes the design considerations of micro assembly machine that aims micron level positioning accuracy for the application of MEMS component assembly. This feature is realized by rigid mechanical setup by considering vibration/stress/thermal analysis in the design stage, and also well-balanced control method by force control and vision servo in the execution stage. As a result, the micrometer level accuracy is achieved without using any special anti-vibration table, thus the initial investment for the assembly task becomes low. This machine was first applied to microchip bonder that is now experimentally tested for industry use, and is to be applied to the accurate assembly of MEMS components.
一般社団法人日本機械学会の論文
2003-11-30