傾斜機能圧電アクチュエータの開発 : 物性・応用

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概要

• 論文の詳細を見る

• A new type of piezoelectric actuator was developed. This piezoelectric actuator consists of three layers : a piezoelectric ceramic layer, a middle layer whose composition changes gradually, and another ceramics layer with high dielectric constant. This type of material is called Functionally Gradient Material (FGM). Two green sheets made from two different materials were laminated and sintered monolithically. The compositions of these two different ceramics were selected from the system Pb(Ni_<1/3>Nb_<2/3>)O_3-PbZrO_3-PbTiO_3. The bending displacement is about 60 μm, at 100 V applied at room temperature. The size of the plate (L×W×t) is 25×5×0.65 mm^3. An attempt was made to prepare a 3-dimensional FGM piezoelectric plate using a dispenser with a computer controlling the XY-stage. This equipment can change the distribution of the composition along the plane and across the thickness direction. An FGM piezoelectric plate that has a periodic structure (A on B vice versa alternating side by side repeatedly) is made by this equipment.

• 社団法人日本セラミックス協会の論文
• 1990-08-01

著者

• 河合 高志

  横河電機(株)EDA開発センター

• 宮崎 俊一

  横河電機(株)研究開発3部第2研究室

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• 傾斜機能圧電アクチュエータの開発 : 物性・応用

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