MOCVD法による酸化鉄薄膜の合成

概要

論文の詳細を見る
Iron oxide thin films were deposited from 400 to 600℃ by CVD from iron acetylacetonate (Fe(acac)_3) using N_2 as the transporting gas and separately introduced O_2 as oxidation gas. β-Fe_2O_3 tended to be formed independent of O_2 flow rate at 400℃. At 500 and 600℃, spinel-type Fe_3O_<4+x> was formed under low O_2 flow rates. With increasing O_2 flow rate, mixture of β-Fe_2O_3 and spinel-type Fe_3O_<4+x> was formed and the amount of β-Fe_2O_3 phase increased. Further increase in O_2 flow rate resulted in the formation of β-Fe_2O_3 as a single phase. Fourier transformation infrared spectroscopy (FT-IR) measurement suggested that iron acetylacetonate vapor changed the molecular form by decomposition under certain condition. It was supposed that the change in molecular form influences the deposited phase of iron oxide films.
社団法人日本セラミックス協会の論文
1996-10-01