高周波熱プラズマCVDにおけるダイヤモンドの析出形態

概要

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Morphology of diamond which was deposited on a molybdenum substrate by a radio-frequency thermal plasma CVD method in methane, hydrogen and argon atmosphere was investigated using a scanning electron microscope (SEM). It was found that with increasing deposition temperature the habit changed from octahedral to cubic, via intermediate cubo-octahedral forms. Columnar-like crystals of half-octahedron and of multiple twin were grown at low and high deposition temperatures, respectively at a CH_4/H_2 ratio of 0.04. Twins such as a spinel twin and a 5-fold twins were observed. Growth layers such as triangles on {111} and {100} faces, well-defined composite spirals with 4-fold rotation axis and closed loops were observed.
社団法人日本セラミックス協会の論文
1991-08-01