耐酸性ホウケイ酸亜鉛鉛系パッシベーションガラスの特性

概要

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Chemically and electrically stable passivation glass was prepared in the PbO- ZnO-SiO_2-Al_2O_3-B_2O_3 system stabilized by alkaline earth oxides. Physical properties of the prepared glass were close to these of lead borosilicate passivation glass. There was a certain Al_O_3 concentration range in which the reverse current in the diode, passivated by the glass, remarkably reduced. Increasing PbO/ZnO ratio reduced the reverse current, and enlarged the firing temperature ranges where the current was minimized, while the surface charge stability, obtained from C-V characteristic measurement on MGS capacitor before and after BT treatment, decreased by increasing the ratio. Higher firing temperature over the suitable range increased the reverse current, maybe caused by generation recombination center formation as the result of glass attack to the silicon surface. The increase in AL_2O_s increased a negative surface charge in the glass, while BaO in the glass formed a positive surface charge. This surface charge behavior was thought to correspond to the change in the acid-base character of the glass.
社団法人日本セラミックス協会の論文
1988-02-01