RuO_2/ガラス系抵抗体を用いた歪みセンサーの感歪み特性に及ぼす琺瑯基板の影響

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The piezoresistive property (gauge factor) of the strain sensor, which mainly consists of RuO_2/glass thick film piezoresistor and a porcelain enamel substrate covered with partially crystallized galss, was investigated. The piezoresistive property of the piezoresistor on the enameled substrate was less than that on alumina. It was considered that the difference of the properties was caused by the interfacial reaction between the piezoresistor and substrate materials (crystallized glass and alumina). The interfacial reaction was recognized between piezoresistor and porcelain enamel substrate by scanning electron microscopy and thermal analysis (DTA). The piezoresistive property was improved with increasing of the thickness of the piezoresistor and Pb content (PbO/SiO_2 molar ratio) of glass composition. It is concluded that the degradation of the piezoresistive property was due to the interfacial reaction between the glass of piezoresistor and the partially crystallized glass covering substrate.
1997-03-01