Secondary Electron Yield from an Al Surface Bombarded by 20-80 keV Ar^+ Ions
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概要
- 論文の詳細を見る
A secondary electron yield from a polycrystalline Al surface was measured under Ar^+ bombardment. The yield of negatively charged particles γ(θ) was measured as a function of steady state oxygen coverage θ of target surfaces during Ar^+ bombardment. Projectile energy was changed from 20 to 80 keV. The absolute value of effective oxygen coverage θ of a target surface was determined in situ by means of an optical spectroscopic technique in which light intensities emitted by sputtered excited atoms from the target was measured as a function of current densities of the projectile. Absolute yield of secondary electrons at zero oxygen coverage, γ(0), was obtained by measuring yield variation as a function of θ.
- 社団法人日本物理学会の論文
- 2002-03-15
著者
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Tsurubuchi Seiji
Department Of Applied Physics Faculty Of Technology Tokyo University Of Agriculture And Technology
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NIMURA Tomoaki
Department of Applied Physics, Faculty of Technology, Tokyo University of Agriculture and Technology
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Nimura T
Department Of Applied Physics Faculty Of Technology Tokyo University Of Agriculture And Technology
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Nimura Tomoaki
Department Of Applied Physics Faculty Of Technology Tokyo University Of Agriculture And Technology
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WADA Raita
Department of Applied Physics, Faculty of Technology, Tokyo University of Agriculture and Technology
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Wada Raita
Department Of Applied Physics Faculty Of Technology Tokyo University Of Agriculture And Technology
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