Excitation Kinetic in an Argon Plasma Column Produced by a Surface Wave at Atmospheric Pressure

概要

論文の詳細を見る
The excitation kinetic of a surface wave plasma produced by microwave is not well-knoxvn.This work presents an experimental study of this kinetic in Ar plasma. The 4p, 5p and higherlevels of the Ar atomic system have been studied to determine tl'ueir equilibrium separation. 5pand higher levels were found that followed an equilibrium distribution but the 4p levels wereunderpopulated irt respect to this ditribution. Tlxen the plasma is a recombining plasma whiclais in partial local thermodynamic equilibrium (pLTE). Using the phase diagram tlaat is dividedin different areas by the Green and Byron criterium we have established that the 4p levels arein saturation zone and the 5p levels and higher ones are in pLTE. For our discharge positions,those nearest to the excitator are the nearest to equilibrium population, because higher electrontemperature and density imply that the plasma is nearer to thermodynamic equilibrium.
社団法人日本物理学会の論文
1996-04-15