Ripple of Electron Temperature in R.F.Plasmas
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概要
- 論文の詳細を見る
Since the electron temperature in r.f. plasmas oscillates around the d.c. one, the rip-pie, 7?. is calculated from the energy balance. Next, the electron density ripple, 7?. isdeduced from the difference between the ionization and diffusion loss. The frequencyand pressure ranges for 7?.<< 7?. are found, where the light intensity only follows theelectron temperature, if the life time of the excited atoms is shorter than the period ofthe highest frequency. Then 7?. can be determined from the observed wave pattern ofthe light at a specific wave length. Here 5852.5 A in neon and 5016 A in herium areselected. Finally, the loss factors of electrons tc, which are determined from the ex-perimental values of 7?., are compared with the theoretical ones with a good agree-ment.
- 社団法人日本物理学会の論文
- 1988-09-15
著者
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山下 洋
京都大学フィールド科学教育研究センター舞鶴水産実験所里海生態保全学分野
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Takeda S
Laboratory Of Entomology Faculty Of Agriculture Gifu University
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TAKEDA Susumu
Chubu University
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Hayashi Y
Univ. Osaka Prefecture Osaka
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HAYASHI Youji
Chubu University
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MORI Hideki
Chubu University
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Takeda Susumu
Chubu Institute Of Technology
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