Description of Radio-Frequency Plugging and Heating in Terms of Plasma Impedance
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概要
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Mechanism of radio-frequency plugging and heating are described irx terms ofthe rlasma imredance. It is shown theoreticallv that the rf rlusninn effe<xt ar>r>earsin the frequency region, where the capacitance of rf electrodes decreases when theplasma is filled between them. The heating occurs inversely proportional to theresistance of the electrodes. These theoretical predictions are compareci with theexperitnental observations, demonstrating a satisfactory agreement.
- 社団法人日本物理学会の論文
- 1980-07-15
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