長基線天体光干渉計に用いる長ストローク精密駆動リニアステージの開発

概要

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High precision, Iong stroke linear stage which will be applied to fine delay line for long baseline optical stellar interferometer is being developed. Requirements of the liner stage are precision less than ±λ/40 of movement jitter in an integration time of about 5ms at stage velocity of 0-30mm/s, such a low residual error during 10 minutes interval by closed loop control, and longer than 10m stroke. In this paper, driving mechanism (motors, micro-stepping technique and gears) and isolation method for high frequency vibration with rubbers are studied in order to provide high performance of the linear stage. The linear stage consists of an optics cart and a micro-stepping motor cart moving on stainless steel poles. The stage movement jitter of 8.3nm RMS in 5ms duration was achieved with the best selection of parameters even at the stage velocity of 30mm/s without closed loop control. This performance is enough to use practically as an 800m baseline optical interferometer. It is expected that the performance will become better than at present when a servo control is applied. Furthermore, the rubber isolator will possibly introduce a simpler control architecture of the delay line system.
公益社団法人精密工学会の論文
1999-09-05