走査型プローブ顕微法によるマイクロトライボロジーの検討

概要

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Micro-tribological studies are made using a scanning probe microscope (SPM) which can measure the lateral force as well as the normal force images. The SPM is placed in an atmosphere control apparatus and the relative humidity around the tip-sample is controlled at 30%, or 700%. Measurements are also performed in a high purity water bath. Samples investigated are the cleaved surfaces of mica, HOPG and MoS_2. In order to discuss the micro-tribological effects of adsorbed water molecules and the capillary condensation of water, the lateral force images are examined quantitatively as a function of the normal load on the sample surface. Lateral force images with the lattice periodicity are obtained in the same manner as atomic scale topography images. The dependence of lateral force magnitude on the normal force is found to be affected by the atmosphere around the tip and the sample. From discussion on the viewpoints of Hertz analysis, Elasto-Hydrodynamic Lubrication and capillary condensation of water, the contact mechanism of the tip-sample is revealed.
公益社団法人精密工学会の論文
1998-11-05