衝撃力を利用したリニアダイレクトドライブ機構

概要

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This paper deals with a small linear direct drive mechanism using a piezoelectric element and an example of its application. This mechanism can drive a small or thin object in steps of sub-micrometers up to several tens micrometers. It consists of a piezoelectric element, a guide and a moved object. It can also drive the object vertically. This mechanism has similar performances of displacement to the Impact Drive Mechanism. Because both mechanisms utilize shock excitation caused by rapid deformations of the piezoelectric element, and stick-slip mechanism of friction between the object and a guide. The displacement of the object does not depend on its mass. The experimental results of the displacement of the object are compared with the calculated results which are obtained by solving the motion equations. An application to a directly feeding device of an electrode which is used for electrical discharge machining (EDM) is proposed. The feeding device measures 8 × 9 × 28mm. It can machine holes without exchanging the electrode. This linear drive can be applied to EDM.
1995-04-05