レーザビーム描画装置の開発と応用

概要

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A laser beam writer is developed for high precision and easy operation. The design concept is as follows. The range of precision is about 1 μm, which covers the area between the electron beam writer and the photo plotter or photo reduction. A larger writing area and smaller body is realized for easy operation and maintenance. The construction of the writer is reported in detail. The system has two key units : an air slide table with built-in linear motor and a laser focusing optical device assisted by a focusing servomechanism. For easy operation, two types of command language and P.C. CAD are incorporated in the software system. A line and space pattern is written for evaluation and some experiments for line width control are reported. Finally, several applications are suggested, such as computer-generated holograms, an optical wave guide, an optical integrated circuit, and so on.
公益社団法人精密工学会の論文
1992-11-05