機能性セラミックスのマイクロ波焼結

概要

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The feasibility of microwave sintering of electronic ceramics was investigated using a heating control system. This system comprises a klystron amplifier with 6 GHz band, a single mode rectangular cavity for sintering ceramics, and a controller for operating the heating condition. Eight kinds of electronic ceramic powders, Al_2O_3,AlN, TiO_2,stabilized ZrO_2,ZnO, PZT, PLZT, and BaTiO_3,were prepared as test samples. These powders were compacted into a cylindrical form of 6.6 mm diameter, followed by cold isostatic pressing (CIP). Then, they were sintered in the cavity with either air or nitrogen gas. ZnO and stabilized ZrO_2 were easily sintered in air, and their densities were the same as the theoretical densities. Especially, ZnO could achieve a high density of over 95% of the theoretical with a sintering time of only 5 sec. On the other hand, the microwave sintering of PZT, PLZT, and BaTiO_3 was difficult because uneven heating and melting occurred due to thermal runaway. However, by covering the samples with a silicon carbide tube, the thermal runaway could be prevented. The sintered PZT had uniform microstructure with over 98% of the theoretical density.
公益社団法人精密工学会の論文
1992-01-05