ラッピングテープによるチタン合金研磨用加工液の開発(第2報) : 研磨特性に及ぼす硫黄の影響

概要

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Polishing fluids have been developed for titanium alloy, which can be machined only with extreme difficulty, using lapping tape coated with SiC abrasive grain on tetoron taffeta. The introduction of sulfurized fatty acid into the polishing fluids greatly improved the polishing characteristics. In this paper, it was cleared that (1) polishing characteristics was not only improved in cases of polishing fluid contained sulfurized fatty acid but also in case of the solution of 1wt% ditertdodecylpolysulfide in butylcarbitol. (2) From the results of XPS measurements after polishing operation, when used polishing fluid contained sulfurized fatty acid, a metal oxide phase on the surface was thicker than without sulfurized one. (3) From the results of the reaction analysis of sulfuric molecules on titanium metal surface (4 kinds of conformation) using ab initio molecular orbital method, the total energy calculation showed that H_2S molecule reacted on titanium atom with the stabilizing energy of 22.4 kcal/mol and the optimized configuration of the reacted H_2S was found at 2.16 A on the top site of titanium atom and the bond distance was shorter than Ti-S bond distance of 2.42A in titanium disulfide.
公益社団法人精密工学会の論文
1999-06-05