<RESEARCH REPORT>THE APPLICATION OF RUTHERFORD BACKSCATTERING FOR ANALYZING MULTILAYERED STRUCTURE CHANGE INDUCED BY PULSED ION BEAM BOMBARDMENT
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概要
- 論文の詳細を見る
Using the proton backscattering technique, plane-shaped samples consisting of a double layered film Pb/parylene (polyparaxylene) chemically deposited on a silicon plate were analyzed after bombarded by pulsed proton beams of about 400keV with different current densities upto 1kA/cm^2. We obtained very clear backscattering spectra indicating changes of the layer-structure caused by LIB bombardment. Almost all Pb-layer was ablated, and the boundary between parylene and silicon became diffusive. This method is proved to be very useful for analysis of LIB bombarded samples.
- 核融合科学研究所の論文
著者
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SASAKI N.
Department of Materials Science, Chiba University
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TAKAGI N.
Dept. of Electrical and Computer Engineering, University of Florida
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YANO S.
Department of Neurosurgery, Kumamoto University School of Medicine
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Takagi N.
Department Of Electrical And Electronic Engineering Graduate School Of Engineering Gifu University
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Sasaki N.
Department of Biology, Faculty of Science, Kumamoto University
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