<RESEARCH REPORT>MONOCRYSTAL SPUTTERING BY THE COMPUTER SIMULATION CODE ACOCT
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概要
- 論文の詳細を見る
A new computer code ACOCT has been developed in order to simulate the atomic collisions in the crystalline target within the binary collision approximation. The present code is more convenient as compared with the MARLOWE code, and takes the higher-order simultaneous collisions into account. To cheke the validity of the ACOCT program, we have calculated sputtering yields for various ion-target combinations and compared with the MARLOWE results. It is found that the calculated yields by the ACOCT program are in good agreements with those by the MARLOWE code. The ejection patterns of sputtered atoms were also calculated for the major surfaces of fcc, bcc, diamond and hcp structures, and we have got reasonable agreements with experimental results. In order to know the effects of the simultaneous collision in the slowing down process the sputtering yields and the projected ranges are calculated, changeing the parameter of the criterion for the simulatneous collision, and the effect of the simultaneous collision is found to depend on the crystal orientation.
- 核融合科学研究所の論文
著者
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TAKEUCHI Wataru
Institute of Industrial Science, University of Tokyo
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Takeuchi Wataru
Institute Of Industrial Science University Of Tokyo
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Takeuchi Wataru
Institute Of Plasma Physics Nagoya University:okayama University Of Science
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YAMAMURA Yasunori
Institute of Plasma Physics, Nagoya University
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Yamamura Yasunori
Institute Of Plasma Physics Nagoya University:okayama University Of Science
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