A Two-dimensional Anisotropic Wet Etching Simulator for Quartz Crystal
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概要
- 論文の詳細を見る
We developed an anisotropic wet etching simulator that can predict the etching profile of initial shape, which is two-dimensional and formed by straight lines. New etching rate database of quartz at a special condition was obtained. Improved hull method was used to deal with round corner etching. New programming flow was adopted to avoid improper profile prediction. A friendly graphical user interface was built for users convenience. The simulation result of this simulator meets well with the experimental results and shows nice accuracy in new emerging faces predicting.
- 社団法人 電気学会の論文
- 2011-05-01
著者
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Ueda Toshitsugu
The Graduate School Of Information Production And Systems Waseda University
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Zhao Meng
The Graduate School of Information, Production and Systems, Waseda University
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Wang Jiani
The Graduate School of Information, Production and Systems, Waseda University
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Oigawa Hiroshi
The Graduate School of Information, Production and Systems, Waseda University
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Ji Jing
The Graduate School of Information, Production and Systems, Waseda University
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Hayashi Hisanori
The Graduate School of Information, Production and Systems, Waseda University
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Ji Jing
The Graduate School Of Information Production And Systems Waseda University
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Zhao Meng
The Graduate School Of Information Production And Systems Waseda University
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Wang Jiani
The Graduate School Of Information Production And Systems Waseda University
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Hayashi Hisanori
The Graduate School Of Information Production And Systems Waseda University
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