ポリピロール/金の2層構造を有する3次元マイクロアクチュエーターの作製

概要

論文の詳細を見る
Three-dimensional micro-actuators, consisting of a polypyrrole (PPy)/Au bi-layer, were fabricated by Al anodizing, laser irradiation, and electrochemical techniques. Aluminum specimens covered with porous type oxide films were irradiated with a pulsed Nd-YAG laser to locally remove the oxide films, and then an Au layer and a PPy layer were deposited at the area where the film had been removed. Finally, the specimens were immersed in a NaOH solution after connecting with/without a Pt plate to separate PPy/Au actuators from the Al substrate and anodic oxide film. The PPy layer didn’t lose its electro-conductivity when the specimen was immersed in NaOH solution after connecting with a Pt plate, while the conductivity was lost after immersion of the specimen alone. The immersion with Pt connecting suppressed the reduction of PPy, and enabled the fabrication of PPy/Au actuators. Three-dimensional PPy/Au bi-layer micro-actuators were successfully fabricated using column Al specimens, and much flexible than PPy/Au/resin three-layer actuators reported in a previous paper.
表面技術協会の論文
2009-05-01