パーフルオロ化合物(PFCs)等を含有するマイクロエレクトロニクス製造プロセスからの排出ガス分析技術
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概要
- 論文の詳細を見る
In the manufacturing processes of Semiconductor and the Liquid Crystal Display (LCD), Perfluorocompounds (PFCs), Sulfurhexafluoride (SF6) and Nitrogenfluoride (NF3), which have high Green house effect,are used in large quantities. As emission reduction of these gases, the following countermeasures are taken. 1. Opimization of PFCs usage 2. Utilization of alternative gas 3. Instllation of Scrubber for exhaust gas treatment To inspect the effect of countermeasure that are introduced for these PFCs emission reduction, it is necessary to analyze PFCs in exhaust gas. In this report, we will discribe about analysis technique for exhaust gas including PFCs from microelectornics manufacturing processes.
- 日本真空協会の論文
- 2009-07-20